2026-06-12T20:27:11Z https://icatplus.esrf.fr/oaipmh/request

oai:icatplus.esrf.fr:inv/2116848716 2025-05-31T06:00:19.479Z

4.2 EI 10.15151/ESRF-ES-2116848716 Jolien DENDOOVEN Jolien Dendooven 0000-0002-2385-3693 Jolien DENDOOVEN Jolien Dendooven 0000-0002-2385-3693 Stefano CHECCHIA Stefano Checchia 0000-0003-0499-4885 Matthias FILEZ Matthias Filez Matthias FILEZ Matthias Filez Jorden DE BOLLE Jorden De Bolle 0000-0002-5179-1725 Jorden DE BOLLE Jorden De Bolle 0000-0002-5179-1725 Kinanti Hantiyana ALIYAH Kinanti Hantiyana Aliyah Kinanti Hantiyana ALIYAH Kinanti Hantiyana Aliyah Example Institute 2028 Data from large facility measurement 2025-05-28T06:00:00Z/2025-05-31T06:00:00Z 2025-05-31T06:00:00Z I CC-BY-4.0 Atomic layer deposition (ALD) can atomically tailor the shape and size of metal nanoparticles (NPs) during nucleation. If ultrathin metal films are desired, nucleation enhancement is crucial to obtain layer closure at low film thickness. However, state-of-the-art insights only offer information on the NP size and coverage in the late stages of nucleation, lacking fundamental knowledge on the initial nucleation density and atomic 3D structure of the nuclei in the very early stages of ALD growth, which inhibits nucleation control. In this proposal, our aim is to exploit the developed GIPDF methodology to uncover the role of different parameters which can influence and enhance ALD nucleation of Pt NPs, namely (1) surface pretreatment, (2) photo-assisted ALD, and (3) applying an ill-understood Pt(acac)2-O3 ALD process. By atomistic modelling of the GIPDF data, insights will be extracted which will guide controlled nucleation towards atomically tailored NPs or ultrathin metal films.